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Applications of the SESAM in Materials Science

Published online by Cambridge University Press:  02 July 2020

Wilfried Sigle
Affiliation:
Max-Planck-Institut für Metallforschung, Seestrasse 92, D-70174, Stuttgart
Achim Zern
Affiliation:
Max-Planck-Institut für Metallforschung, Seestrasse 92, D-70174, Stuttgart
Kersten Hahn
Affiliation:
Max-Planck-Institut für Metallforschung, Seestrasse 92, D-70174, Stuttgart
Stefan Krämer
Affiliation:
Max-Planck-Institut für Metallforschung, Seestrasse 92, D-70174, Stuttgart
Ulrike Eigenthaler
Affiliation:
Max-Planck-Institut für Metallforschung, Seestrasse 92, D-70174, Stuttgart
Manfred Rühle
Affiliation:
Max-Planck-Institut für Metallforschung, Seestrasse 92, D-70174, Stuttgart
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Abstract

SESAM stands for "Sub- eV -sub- Ångstrøm -Microscope". The aim of the project is to develop a TEM/STEM which combines the advantages of both types of instruments. The SESAM project is based on three development stages, specifications of which are shown in Table 1. in the final stage an information limit below 1Å and an energy resolution of 0.2 eV is strived for.

Compared to previous energy-filtering microscopes SESAM I is equipped with a 2nd order corrected energy filter [1]. Due to the high transmissivity [2] large scattering angles up to 150mrad at ΔE=20 eV are accepted by this filter which can be used in electron diffraction experiments. A diffraction pattern of amorphous SiBCN ceramic is shown in Fig.l together with a profile. Since the diffracted intensity can be integrated over 2π, high statistical accuracy is achieved even at a moderate exposure time (10s). in energy-filtered imaging large specimen areas are imaged isochromatically.

Type
EELS Microanalysis At High Sensitivity: Advances in Spectrum Imaging, Energy Filtering and Detection (Organized by R. Leapman and J. Bruley)
Copyright
Copyright © Microscopy Society of America 2001

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References

[1] Rose, H. and Krahl, D., in Reimer, L., Ed., Energy-Filtering Transmission Electron Microscopy, Springer, Heidelberg (1995)43.CrossRefGoogle Scholar

[2] Uhlemann, S. and Rose, H., Ultramicroscopy 63 (1996)161.CrossRefGoogle Scholar

[3] Cockayne, D.J.H. and McKenzie, D.R., Acta Cryst. A44 (1988)870.CrossRefGoogle Scholar

[4] Sigle, W.et al., J. of Electron Microscopy, submittedGoogle Scholar