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Applications of an in-situ Low Energy Argon Ion Source for Improvement of TEM and SEM Sample Quality

Published online by Cambridge University Press:  04 August 2017

Anna Prokhodtseva ,
Johannes Mulders  and
Tomas Vystavel
Anna Prokhodtseva
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, 627 00 Brno, Czech Republic.
Johannes Mulders
Affiliation:
Thermo Fisher Scientific, Achtseweg Noord 5, 5651 GG Eindhoven, Netherlands.
Tomas Vystavel
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, 627 00 Brno, Czech Republic.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 298 - 299
Copyright
© Microscopy Society of America 2017 

References

[1] Mulders, Johannes & Trompenaars, Piet An in-situ Low Energy Argon Ion Source for Local Surface Modification. The 16th European Microscopy Congress, Lyon, France.Google Scholar