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Application of Temperature Controlled Stage in Atmospheric Scanning Electron Microscopy

Published online by Cambridge University Press:  04 August 2017

Mari Sakaue ,
Saori Miyoshi  and
Yusuke Ominami
Mari Sakaue
Affiliation:
Tokyo Solution Lab., Hitachi High-Technologies Corp., KANAGAWA SCIENCEPARK, R&D BUSINESSPARK BLDG C-1F, 3-2-1, Sakado, Takatsu, Kawasaki, Kanagawa 213-0012, Japan
Saori Miyoshi
Affiliation:
Tokyo Solution Lab., Hitachi High-Technologies Corp., KANAGAWA SCIENCEPARK, R&D BUSINESSPARK BLDG C-1F, 3-2-1, Sakado, Takatsu, Kawasaki, Kanagawa 213-0012, Japan
Yusuke Ominami
Affiliation:
Hitachi High-Technologies Corporation, 882, Ichige, Hitachinka-shi, Ibaraki-ken, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 70 - 71
Copyright
© Microscopy Society of America 2017 

References

[1] Ominami, Y., et al, Microscopy 64, 97–104, 2014.Google Scholar
[2] Nguyen, K., Holtz, M. & Muller, D. Microsc. Microanal 19(Suppl 2 2013.Google Scholar
[3] Ominami, Y., et al, Proc. of SPIE, 9236 923604-1 2014.Google Scholar