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Application of Electron Tomography for Semiconductor Device Analysis

Published online by Cambridge University Press:  31 July 2006

C Kuebel ,
T-C Lee ,
D Su ,
J-S Luo ,
H-M Lo  and
J Russell
C Kuebel
Affiliation:
Fraunhofer Institute Bremen
T-C Lee
Affiliation:
Taiwan Semiconductor Manufacturing Company
D Su
Affiliation:
Taiwan Semiconductor Manufacturing Company
J-S Luo
Affiliation:
Inotera Memories,Taiwan
H-M Lo
Affiliation:
Inotera Memories,Taiwan
J Russell
Affiliation:
Inotera Memories,Taiwan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1552 - 1553
Copyright
© 2006 Microscopy Society of America