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Application of a Semi-in-Lens FE-SEM to the Crystallographic Analysis with the EBSD Technique

Published online by Cambridge University Press:  23 September 2015

Hiroyuki Ito
Affiliation:
Application Development Department, Science Systems Design Division, Hitachi High-Technologies, 1040, Ichige, Hitachinaka, Ibaraki, 312-0033, Japan
Yoichiro Hashimoto
Affiliation:
Application Development Department, Science Systems Design Division, Hitachi High-Technologies, 1040, Ichige, Hitachinaka, Ibaraki, 312-0033, Japan
Shuichi Takeuchi
Affiliation:
Application Development Department, Science Systems Design Division, Hitachi High-Technologies, 1040, Ichige, Hitachinaka, Ibaraki, 312-0033, Japan
Masahiro Sasajima
Affiliation:
Electron Microscope Systems Design 1st Department, Science Systems Design Division, Hitachi High-Technologies, 882, Ichige, Hitachinaka, Ibaraki, 312-8504, Japan
Hirofumi Sato
Affiliation:
Electron Microscope Systems Design 1st Department, Science Systems Design Division, Hitachi High-Technologies, 882, Ichige, Hitachinaka, Ibaraki, 312-8504, Japan
Hirobumi Morita
Affiliation:
NanoAnalysis Department, Oxford Instruments, IS Building, 3-32-42, Higashi-Shinagawa, Shinagawa-ku, Tokyo, 140-0002, Japan

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Takeuchi, S, et al., Microsc. Microanal Vol.19(Suppl 2) (2013). p. p.13101311.Google Scholar