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Angular Backscatter Filtering with an Immersion Lens SEM

Published online by Cambridge University Press:  01 August 2010

B Lich ,
L Novak ,
E Bosch ,
DJ Stokes ,
DW Phifer  and
L Tuma
B Lich
Affiliation:
FEI Company, The Netherlands
L Novak
Affiliation:
FEI Company, Czech Republic
E Bosch
Affiliation:
FEI Company, Czech Republic
DJ Stokes
Affiliation:
FEI Company, The Netherlands
DW Phifer
Affiliation:
FEI Company, The Netherlands
L Tuma
Affiliation:
FEI Company, Czech Republic

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 402 - 403
Copyright
Copyright © Microscopy Society of America 2010