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Analysis Of “Invisible” Poly-Bump Defect With EFTEM Spectral Imaging

Published online by Cambridge University Press:  26 July 2009

CT Schamp ,
R Rios  and
A Gill
CT Schamp
Affiliation:
Cerium Labs
R Rios
Affiliation:
Spansion Inc
A Gill
Affiliation:
Cerium Labs

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 1242 - 1243
Copyright
Copyright © Microscopy Society of America 2009