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TEM Study of AlN/Oxides (SiOx or AlxOy) Nanocomposite Films Prepared by a Differential Pumping Co-Sputtering System

Published online by Cambridge University Press:  23 November 2012

M. Nose
Affiliation:
University of Toyama, Takaoka, Japan
W. Chiou
Affiliation:
NISP Lab, NanoCenter, University of Maryland, College Park, MD
H. Takabatake
Affiliation:
University of Toyama, Toyama, Japan
T. Satho
Affiliation:
University of Toyama, Toyama, Japan
T. Kawabata
Affiliation:
University of Toyama, Toyama, Japan
K. Matsuda
Affiliation:
University of Toyama, Toyama, Japan

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2012

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TEM Study of AlN/Oxides (SiOx or AlxOy) Nanocomposite Films Prepared by a Differential Pumping Co-Sputtering System
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TEM Study of AlN/Oxides (SiOx or AlxOy) Nanocomposite Films Prepared by a Differential Pumping Co-Sputtering System
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TEM Study of AlN/Oxides (SiOx or AlxOy) Nanocomposite Films Prepared by a Differential Pumping Co-Sputtering System
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