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Resolution and Contrast in Dual Beam Imaging of Three Dimensional Structures of Microelectronic Devices

Published online by Cambridge University Press:  05 August 2007

J Evertsen  and
E Lifshin
J Evertsen
Affiliation:
University at Albany
E Lifshin
Affiliation:
University at Albany
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 178 - 179
Copyright
© 2007 Microscopy Society of America

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