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A New 200kv Energy Filter Field Emission Transmission Electron Microscope

Published online by Cambridge University Press:  02 July 2020

T. Kaneyama ,
K. Tsuno ,
T. Honda ,
M. Kersker ,
K. Tsuda ,
M. Terauchi  and
M. Tanaka
T. Kaneyama
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo 196-8558, Japan
K. Tsuno
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo 196-8558, Japan
T. Honda
Affiliation:
JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo 196-8558, Japan
M. Kersker
Affiliation:
JEOL USA Inc., 11 Dearborn Road, Peabody, MA, 01960
K. Tsuda
Affiliation:
Research Institute for Scientific Measurements,Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
M. Terauchi
Affiliation:
Research Institute for Scientific Measurements,Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
M. Tanaka
Affiliation:
Research Institute for Scientific Measurements,Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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Extract

In the field of biological and materials sciences, the importance of energy filter transmission electron microscope(EF-TEM) is increasing. Because it is a powerful instrument for contrast enhancement and obtaining elemental mapping images. We have developed a 200kV EF-TEM equipped with a fieldemission gun and in-column spectrometer. The new EF-TEM JEM-2010FEF inherits the performance in high resolution imaging and analysis from field emission TEM. The outer view is shown in Fig.l.

Figure 2 shows the lens configuration of JEM-2010FEF. An in-column Q-type spectrometer is introduced within the imaging lens system. It was designed to have image distortion less than 1% and dispersion power 1.2p.m/eV for 200keV electrons. There is no need of compensating procedure of distortion. Imaging lens system consists of two objective lenses, three intermediate lenses and three projector lenses. The 8-stage imaging lens system enables wide range of imaging modes equal to conventional TEMs; energy spectroscopic image of magnification from ×200 to × 1,500,000, energy spectroscopic diffraction of camera length from 200mm to 2,000mm.

Type
Advances in Instrumentation and Performance
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 396 - 397
Copyright
Copyright © Microscopy Society of America

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References

l.Tsuno, K., Kaneyama, T., Honda, T., Tsuda, K., Terauchi, M. and Tanaka, M., J.Electron Microsc. 46(1997)357.CrossRefGoogle Scholar