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Compositional Analysis with Atomic Column Spatial Resolution by 5th-Order Aberration-Corrected Scanning Transmission Electron Microscopy

Published online by Cambridge University Press:  27 May 2011

David Hernández-Maldonado
Affiliation:
Departamento de Ciencia de los Materiales e I.M. y Q.I., Facultad de Ciencias, Universidad de Cádiz, Campus Río San Pedro, s/n, 11510 Puerto Real, Cádiz, Spain
Miriam Herrera
Affiliation:
Departamento de Ciencia de los Materiales e I.M. y Q.I., Facultad de Ciencias, Universidad de Cádiz, Campus Río San Pedro, s/n, 11510 Puerto Real, Cádiz, Spain
Pablo Alonso-González
Affiliation:
Instituto de Microelectrónica de Madrid (CNM-CSIC), Isaac Newton 8 (PTM), 28760-Tres Cantos (Madrid), Spain
Yolanda González
Affiliation:
Instituto de Microelectrónica de Madrid (CNM-CSIC), Isaac Newton 8 (PTM), 28760-Tres Cantos (Madrid), Spain
Luisa González
Affiliation:
Instituto de Microelectrónica de Madrid (CNM-CSIC), Isaac Newton 8 (PTM), 28760-Tres Cantos (Madrid), Spain
Jaume Gazquez
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, USA
María Varela
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, USA
Stephen J. Pennycook
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, USA
María de la Paz Guerrero-Lebrero
Affiliation:
Departamento de Lenguajes y Sistemas Informáticos, CASEM, Universidad de Cádiz, Campus Río San Pedro, s/n, 11510 Puerto Real, Cádiz, Spain
Joaquín Pizarro
Affiliation:
Departamento de Lenguajes y Sistemas Informáticos, CASEM, Universidad de Cádiz, Campus Río San Pedro, s/n, 11510 Puerto Real, Cádiz, Spain
Pedro L. Galindo
Affiliation:
Departamento de Lenguajes y Sistemas Informáticos, CASEM, Universidad de Cádiz, Campus Río San Pedro, s/n, 11510 Puerto Real, Cádiz, Spain
Sergio I. Molina
Affiliation:
Departamento de Ciencia de los Materiales e I.M. y Q.I., Facultad de Ciencias, Universidad de Cádiz, Campus Río San Pedro, s/n, 11510 Puerto Real, Cádiz, Spain
Corresponding
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Abstract

We show in this article that it is possible to obtain elemental compositional maps and profiles with atomic-column resolution across an InxGa1−xAs multilayer structure from 5th-order aberration-corrected high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) images. The compositional profiles obtained from the analysis of HAADF-STEM images describe accurately the distribution of In in the studied multilayer in good agreement with Muraki's segregation model [Muraki, K., Fukatsu, S., Shiraki, Y. & Ito, R. (1992). Surface segregation of In atoms during molecular beam epitaxy and its influence on the energy levels in InGaAs/GaAs quantums wells. Appl Phys Lett61, 557–559].

Type
Materials Applications
Copyright
Copyright © Microscopy Society of America 2011

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References

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Compositional Analysis with Atomic Column Spatial Resolution by 5th-Order Aberration-Corrected Scanning Transmission Electron Microscopy
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