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Atomic Scale Characterization Of Interfaces And Defects In Non-Stoichiometricmulticomponent Oxides

Published online by Cambridge University Press:  02 July 2020

S. Stemmer ,
S. K. Streiffer ,
A. Sane ,
T. J. Mazanec  and
N. D. Browning
S. Stemmer
Affiliation:
Physics Department, University of Illinois at Chicago, Chicago, IL60607-7059
S. K. Streiffer
Affiliation:
Argonne National Laboratory, Materials Science Division, Argonne, IL60439-4838
A. Sane
Affiliation:
BP Chemicals/Amoco, , Cleveland, OH44128-2837
T. J. Mazanec
Affiliation:
BP Chemicals/Amoco, , Cleveland, OH44128-2837
N. D. Browning
Affiliation:
Physics Department, University of Illinois at Chicago, Chicago, IL60607-7059
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The ability to obtain chemical information with (near) atomic resolution has recently become possible by a combined approach of Z-contrast imaging with electron energy-loss spectroscopy (EELS) in scanning transmission electron microscopes. This method is particularly interesting for the characterization of structure-property relationships in novel multicomponent oxides, which possess added functionality due to their high nonstoichiometry.

In this paper we demonstrate the capabilities of this method in analyzing the microstructural mechanisms of accommodation of non-stoichiometry, using two example systems: (Ba,Sr)TiO3thin films for DRAM applications, grown by MOCVD with different amounts of excess titanium, and an oxygen-deficient perovskite ceramic, SrCoOx. The experiments were performed in a JEOL JEM 201 OF field emission transmission electron microscope, operating at 200 kV, equipped with an annular dark-field detector, scanning unit and a post-column imaging filter (Gatan GIF 200). This microscope has been demonstrated to achieve probe sizes of under 1.5 Å .

Type
Atomic Structure And Microchemistry Of Interfaces
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 106 - 107
Copyright
Copyright © Microscopy Society of America

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References

1. James, E. M., Browning, N. D., accepted for publication in: Ultramicroscopy (1999).Google Scholar

2. Stemmer, S., Streiffer, S. K., Kingon, A. I., Browning, N. D., submitted to: Applied Physics Letters.Google Scholar

3. This research was funded by the DOE (grant number DE-GF02-96ER45610) and by BP Chemicals under a subcontract from NIST ATP Cooperative Agreement 70NANB5H1065. S.S, S.K.S andN.D.B. would like to acknowledge A. I. Kingon and his group at NCSU and ATMI for supplying the BST samples.Google Scholar