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3D Nanostructures Grown via Focused Helium Ion Beam Induced Deposition

Published online by Cambridge University Press:  01 August 2018

Matthew J. Burch ,
Anton Ievlev ,
Songkil Kim ,
Alex Belianinov ,
Olga S. Ovchinnikova ,
Michael G. Stanford ,
Kyle Mahady ,
Brett B. Lewis ,
Jason D. Fowlkes  and
Philip D. Rack
Matthew J. Burch
Affiliation:
Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN.
Anton Ievlev
Affiliation:
Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN.
Songkil Kim
Affiliation:
Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN.
Alex Belianinov
Affiliation:
Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN. Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN
Olga S. Ovchinnikova
Affiliation:
Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN. Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN
Michael G. Stanford
Affiliation:
Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN
Kyle Mahady
Affiliation:
Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN
Brett B. Lewis
Affiliation:
Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN
Jason D. Fowlkes
Affiliation:
Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN. Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN
Philip D. Rack
Affiliation:
Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN. Department of Materials Science and Engineering, University of Tennessee, Knoxville, TN

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 332 - 333
Copyright
© Microscopy Society of America 2018 

References

[1] Lipp, S., et al, Microelectronics Reliability 36 1996) p. 1779.Google Scholar
[2] Utke, I., Moshkalev, S. Russell, P. Nanofabrication using focused ion and electron beams: principles and applications. Oxford University Press 2012.Google Scholar
[3] Van Dorp, W. Hagen, C. W. Journal of Applied Physics 104 2008) p. 10.Google Scholar
[4] Fowlkes, J. D., et al, ACS nano 10 2016) p. 6163.Google Scholar
[5] Belianinov, A., et al, MRS Bulletin 42 2017) p. 660.Google Scholar
[6] Hlawacek, G. Golzhauser, A. eds Helium Ion Microscopy. Cham: Springer International Publishing 2016.Google Scholar
[7] The HIM imaging, image analytics and simulations portion of this research was conducted at the Center for Nanophase Materials Sciences, which is a DOE Office of Science User Facility. This research was funded by the Center for Nanophase Materials Sciences, which is a U. S. Department of Energy Office of Science User Facility.Google Scholar