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3D Elemental Mapping Using a Dedicated STEM Equipped with a Real-Time EELS Imaging System

Published online by Cambridge University Press:  03 August 2008

T Yaguchi ,
K Kaji ,
H Kikuchi ,
M Miyakawa ,
H Okushima ,
M Konno  and
T Kamino
T Yaguchi
Affiliation:
Hitachi High-Technologies Corp, Japan
K Kaji
Affiliation:
Hitachi High-Technologies Corp, Japan
H Kikuchi
Affiliation:
Hitachi High-Technologies Corp, Japan
M Miyakawa
Affiliation:
Hitachi High-Technologies Corp, Japan
H Okushima
Affiliation:
Hitachi High-Technologies Corp, Japan
M Konno
Affiliation:
Hitachi High-Technologies Corp, Japan
T Kamino
Affiliation:
Hitachi High-Technologies Corp, Japan
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1404 - 1405
Copyright
© 2008 Microscopy Society of America

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