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3D Characterization Study of High-k Dielectric on GaN Using Atom Probe Tomography

Published online by Cambridge University Press:  09 October 2013

B. Mazumder
Affiliation:
X. Liu
Affiliation:
U.K. Mishra
Affiliation:
J.S. Speck
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2013