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3D Characterization Study of High-k Dielectric on GaN Using Atom Probe Tomography

Published online by Cambridge University Press:  09 October 2013

B. Mazumder ,
X. Liu ,
U.K. Mishra  and
J.S. Speck
B. Mazumder
Affiliation:
X. Liu
Affiliation:
U.K. Mishra
Affiliation:
J.S. Speck
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 1026 - 1027
Copyright
Copyright © Microscopy Society of America 2013