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Simultaneous existence of stochastic and ohmic heating in capacitive discharges

Published online by Cambridge University Press:  14 March 2019

Khristo Tarnev Open the ORCID record for Khristo Tarnev [Opens in a new window]  and
Rositsa Pavlova Open the ORCID record for Rositsa Pavlova [Opens in a new window]
Khristo Tarnev*
Affiliation:
Faculty of Applied Mathematics and Informatics, Technical University Sofia, 8 Kliment Ohridski Blvd., Sofia 1000, Bulgaria
Rositsa Pavlova
Affiliation:
Faculty of Applied Mathematics and Informatics, Technical University Sofia, 8 Kliment Ohridski Blvd., Sofia 1000, Bulgaria
*
†Email address for correspondence: tarnev@tu-sofia.bg
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Abstract

A one-dimensional particle-in-cell/Monte Carlo (PIC/MCC) model of low-pressure capacitive discharges with a large discharge gap is presented in the paper. The results from the model are for the dependence of the plasma parameters on the pressure and on the discharge radius. The study is directed to the heating mechanisms in the discharge. It is shown that the ohmic (Joule) heating in the plasma bulk could act simultaneously with the stochastic heating in the region of the plasma–sheath boundary. In confirmation of the results of the model, experimental results showing qualitatively the same behaviour are presented.

Keywords

plasma heatingplasma simulation
Type
Research Article
Information
Journal of Plasma Physics , Volume 85 , Issue 2 , April 2019 , 905850201
Copyright
© Cambridge University Press 2019 

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