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Synthesis of YBa2Cu3O7−x thin films by three-stage oxidation process from metallic Y–Ba–Cu precursors
Published online by Cambridge University Press: 31 January 2011
Abstract
Growth behavior of YBa2Cu3O7-x (YBCO) thin films from metallic Y–Ba–Cu precursors was investigated. The precursors were prepared by coevaporation of the constituent metallic sources under ultra-high vacuum conditions, and they were oxidized in a load lock chamber and a tube furnace. The grain size of YBCO and degree of crystallographic orientation of the films increased with decreasing oxygen partial pressure p(O2) during transformation of the precursor into the crystal close to the thermodynamic stability line of YBa2Cu3O6.0 in a p(O2) – 1/T phase diagram. The growth of YBCO crystal is controlled by the oxygen diffusion along the c-axis direction of the crystal. The diffusion coefficient of oxygen is determined as D = 1.94 × 1010 exp(−433 000/RT) (cm2/s).
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- Copyright © Materials Research Society 1993
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