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Preparation of Pb(Zr0.52Ti0.48)O3 thin films on Pt/RuO2 double electrode by a new sol-gel route

Published online by Cambridge University Press:  31 January 2011

Seung-Hyun Kim ,
Yong-Soo Choi ,
Chang-Eun Kim  and
Young-Jei Oh
Seung-Hyun Kim
Affiliation:
Department of Ceramic Eng., YonSei University, 134 Shinchon-dong, Seoul, 120–749, Korea
Yong-Soo Choi
Affiliation:
Department of Ceramic Eng., YonSei University, 134 Shinchon-dong, Seoul, 120–749, Korea
Chang-Eun Kim
Affiliation:
Division of Ceramics, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul, 130–650, Korea
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Abstract

Pb(Zr0.52Ti0.48)O3 (PZT) thin film on Pt/RuO2 double electrode was successfully prepared by using a new alkoxide-alkanolamine, sol-gel method. It was observed that the use of Pt/RuO2 double electrode reduced leakage current, resulting in a marked improvement in the leakage characteristics and more reliable capacitors. Typical P-E hysteresis behavior was observed even at low applied voltage of 5 V, manifesting greatly improved remanence and coercivity. Fatigue and breakdown characteristics, measured at 5 V, showed stable behavior, and no degradation in polarization was observed up to 1011 cycles.

Type
Articles
Information
Journal of Materials Research , Volume 12 , Issue 6 , June 1997 , pp. 1576 - 1581
Copyright
Copyright © Materials Research Society 1997

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References

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