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Novel nanosample preparation with a helium ion microscope

Published online by Cambridge University Press:  03 April 2013

Maria Rudneva ,
Emile van Veldhoven ,
Sairam K. Malladi ,
Diederik Maas  and
Henny W. Zandbergen
Maria Rudneva*
Affiliation:
Delft University of Technology, Kavli Institute of Nanoscience, 2628 CJ Delft, The Netherlands
Emile van Veldhoven
Affiliation:
TNO - van Leeuwenhoek Laboratory, 2826 CK Delft, The Netherlands
Sairam K. Malladi
Affiliation:
Delft University of Technology, Kavli Institute of Nanoscience, 2628 CJ Delft, The Netherlands
Diederik Maas
Affiliation:
TNO - van Leeuwenhoek Laboratory, 2826 CK Delft, The Netherlands
Henny W. Zandbergen
Affiliation:
Delft University of Technology, Kavli Institute of Nanoscience, 2628 CJ Delft, The Netherlands
*
a)Address all correspondence to this author. e-mail: m.rudneva@tudelft.nl
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Abstract

In this article, we present novel sample preparation methods using a helium ion microscope (HIM). We report the possibility of reshaping, at room temperature, thin metal lines on an electron-transparent membrane: A set of platinum bridges with standard geometry (300 × 200 × 15 nm) was modified at room temperature into different shapes using focused helium (He)-ion beam. Also the applicability of the HIM as a tool for precise modification of silicon (Si) and strontium titanate (SrTiO3) lamellae is shown and discussed. We demonstrated that in situ heating (e.g., at 600 °C) of the samples during He-beam illumination by use of a specially developed heating stage enables production of thin Si and SrTiO3 samples without significant artifacts. The quality of such cuts was inspected by transmission electron microscopy with high-resolution imaging, and the diffraction patterns were analyzed.

Type
Invited Feature Papers
Information
Journal of Materials Research , Volume 28 , Issue 8 , 28 April 2013 , pp. 1013 - 1020
Copyright
Copyright © Materials Research Society 2013

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References

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