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Measurement of crystalline strain and orientation in diamond films grown by chemical vapor deposition

Published online by Cambridge University Press:  31 January 2011

E. D. Specht ,
R. E. Clausing  and
L. Heatherly
E. D. Specht
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6117
R. E. Clausing
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6117
L. Heatherly
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6117
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Abstract

We have used x-ray diffraction to characterize diamond films grown in three characteristic morphologies by chemical vapor deposition. Each morphology has a fiber texture about the growth direction; we report the crystal axis aligned in this direction for each morphology. In all cases the average lattice constant agrees with that of bulk diamond; we report the range of strain in each sample.

Type
Diamond and Diamond-Like Materials
Information
Journal of Materials Research , Volume 5 , Issue 11 , November 1990 , pp. 2351 - 2355
Copyright
Copyright © Materials Research Society 1990

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References

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