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Formation of convex shaped poly(phenylsilsesquioxane) micropatterns on indium tin oxide substrates with hydrophobic-hydrophilic patterns using the electrophoretic sol-gel deposition method

Published online by Cambridge University Press:  01 May 2006

Kenji Takahashi ,
Kiyoharu Tadanaga ,
Atsunori Matsuda ,
Akitoshi Hayashi  and
Masahiro Tatsumisago
Kenji Takahashi*
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Osaka Prefecture University, Sakai, Osaka 599-8531, Japan
Kiyoharu Tadanaga
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Osaka Prefecture University, Sakai, Osaka 599-8531, Japan
Atsunori Matsuda
Affiliation:
Department of Materials Science, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
Akitoshi Hayashi
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Osaka Prefecture University, Sakai, Osaka 599-8531, Japan
Masahiro Tatsumisago
Affiliation:
Department of Applied Chemistry, Graduate School of Engineering, Osaka Prefecture University, Sakai, Osaka 599-8531, Japan
*
a) Address all correspondence to this author. e-mail: kenji@chem.osakafu-u.ac.jp
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Abstract

Hydrophobic-hydrophilic patterns were formed on indium tin oxide substrates, and thick films of poly(phenylsilsesquioxane) (PhSiO3/2) particles, prepared by the sol-gel process, were selectively deposited onto hydrophilic areas of the substrates by electrophoresis. The films composed of PhSiO3/2 particles became transparent with morphological changes from aggregates of particles to a continuous phase after a heat treatment. After heat treatment at 200 °C, convex-shaped PhSiO3/2 micropatterns were formed on the hydrophilic region of the pattern. Moreover, the height of micropatterns was controlled by the deposition time. This patterning technique has a wide variety of applications such as fabrication of micro-optical components.

Keywords

Sol-gel
Type
Articles
Information
Journal of Materials Research , Volume 21 , Issue 5 , May 2006 , pp. 1255 - 1260
Copyright
Copyright © Materials Research Society 2006

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References

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