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The Effects of Chloromethane on Diamond Nucleation and Growth in a Hot-filament Chemical Vapor Deposition Reactor

Published online by Cambridge University Press:  31 January 2011

Jih-Jen Wu  and
Franklin Chau-Nan Hong
Jih-Jen Wu
Affiliation:
Department of Chemical Engineering, National Cheng-Kung University, Tainan, Taiwan 701, Republic of China
Franklin Chau-Nan Hong*
Affiliation:
Department of Chemical Engineering, National Cheng-Kung University, Tainan, Taiwan 701, Republic of China
*
a)corresponding author.
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Abstract

The effects of chloromethane on diamond nucleation and growth were studied by employing laser reflective interferometry. Chloromethane enhances the film-growth rate only slightly compared to methane. However, chloromethane greatly enhances the nucleation density and shortens the film-forming stage, more significantly at a lower temperature. Thus, chloromethane facilitates the low temperature growth mainly through the enhancement of nucleation. Nucleation density is strongly dependent on the compositions of H atoms and carbon species prior to diamond growth. The residual diamond seeds by diamond-grit scratching are suggested to be the major nucleation sites. Chloromethane can enhance diamond nucleation by protecting the residual seeds from being etched by H atoms.

Type
Articles
Information
Journal of Materials Research , Volume 13 , Issue 9 , September 1998 , pp. 2498 - 2504
Copyright
Copyright © Materials Research Society 1998

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