Hostname: page-component-848d4c4894-2xdlg Total loading time: 0 Render date: 2024-06-21T10:03:32.509Z Has data issue: false hasContentIssue false
  • English
  • Français

Berkovich indentation of diamondlike carbon coatings on silicon substrates

Published online by Cambridge University Press:  31 January 2011

Ayesha J. Haq ,
P.R. Munroe ,
M. Hoffman ,
P.J. Martin  and
A. Bendavid
Ayesha J. Haq*
Affiliation:
School of Materials Science and Engineering, University of New South Wales, Sydney, NSW 2052, Australia
P.R. Munroe
Affiliation:
School of Materials Science and Engineering, University of New South Wales, Sydney, NSW 2052, Australia
M. Hoffman
Affiliation:
School of Materials Science and Engineering, University of New South Wales, Sydney, NSW 2052, Australia
P.J. Martin
Affiliation:
Commonwealth Scientific and Industrial Research Organization (CSIRO) Materials Science and Engineering, Lindfield, NSW 2070, Australia
A. Bendavid
Affiliation:
Commonwealth Scientific and Industrial Research Organization (CSIRO) Materials Science and Engineering, Lindfield, NSW 2070, Australia
*
a)Address all correspondence to this author. e-mail: ayesha@materials.unsw.edu.au
Get access

Abstract

The deformation behavior of diamondlike carbon (DLC) coatings on silicon substrates induced by Berkovich indentation has been investigated. DLC coatings deposited by a plasma-assisted chemical vapor deposition technique were subjected to nanoindentation with a Berkovich indenter over a range of maximum loads from 100 to 300 mN. Distinct pop-ins were observed for loads greater than 150 mN. However, no pop-out was observed for the loads studied. The top surface of the indents showed annular cracks with associated fragmented material. The cross sections showed up to 20% localized reduction in thickness of the DLC coating beneath the indenter tip. Cracking, {111} slip, stacking faults, and localized phase transformations were observed in the silicon substrate. The discontinuities in the load–displacement curves at low loads are attributed to plastic deformation of the silicon substrate, whereas at higher loads they are attributed to plastic deformation as well as phase transformation.

Keywords

SiThin filmTransmission electron microscopy (TEM)
Type
Articles
Information
Journal of Materials Research , Volume 23 , Issue 7 , July 2008 , pp. 1862 - 1869
Copyright
Copyright © Materials Research Society 2008

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Lettington, A.H.: Applications of diamond-like carbon thin films. Carbon 36, 555 1998CrossRefGoogle Scholar
2Grill, A.Patel, V.: Tribological properties of diamond-like carbon and related materials. Diamond Relat. Mater. 2, 597 1993CrossRefGoogle Scholar
3Bhushan, B.: Chemical, mechanical and tribological characterization of ultra-thin and hard amorphous carbon coatings as thin as 3.5 nm: Recent developments. Diamond Relat. Mater. 8, 1985 1999CrossRefGoogle Scholar
4Li, X., Diao, D.Bhushan, B.: Fracture mechanisms of thin amorphous carbon films in nanoindentation. Acta Mater. 45, 4453 1997CrossRefGoogle Scholar
5Li, X.Bhushan, B.: Measurement of fracture toughness of ultra-thin amorphous carbon films. Thin Solid Films 315, 214 1998CrossRefGoogle Scholar
6Sanchez-Lopez, J.C., Donnet, C., Loubet, J.L., Belin, M., Grill, A., Patel, V.Jahnes, C.: Tribological and mechanical properties of diamond-like carbon prepared by high-density plasma. Diamond Relat. Mater. 10, 1063 2001CrossRefGoogle Scholar
7Tojo, H., Mokuno, Y., Chayahara, A., Iura, S., Kasai, H., Toyohara, N., Hidaka, T., Isogawa, S., Hijino, M.Horino, Y.: Properties of diamond like carbon films by plasma based ion implantation and deposition method applied radio frequency wave and negative high voltage pulses through single feedthrough. Nucl. Instrum. Methods Phys. Res., Sect. B 206, 717 2003CrossRefGoogle Scholar
8Zou, Y.S., Wang, W., Song, G.H., Du, H., Gong, J., Huang, R.F.Wen, L.S.: Influence of the gas atmosphere on the microstructure and mechanical properties of diamond-like carbon films by arc ion plating. Mater. Lett. 58, 3271 2004CrossRefGoogle Scholar
9Chowdhury, S., Laugier, M.T.Rahman, I.Z.: Effect of target self-bias voltage on the mechanical properties of diamond-like carbon films deposited by RF magnetron sputtering. Thin Solid Films 468, 149 2004CrossRefGoogle Scholar
10Chowdhury, S., Laugier, M.T.Rahman, I.Z.: Characterization of DLC coatings deposited by rf magnetron sputtering. J. Mater. Process. Technol. 153–154, 804 2004CrossRefGoogle Scholar
11Beake, B.D.Lau, S.P.: Nanotribological and nanomechanical properties of 5–80 nm tetrahedral amorphous carbon films on silicon. Diamond Relat. Mater. 14, 1535 2005CrossRefGoogle Scholar
12Staedler, T.Schiffmann, K.: Correlation of nanomechanical and nanotriboligical behavior of thin DLC coatings on difference substrates. Surf. Sci. 482–485, 1125 2001CrossRefGoogle Scholar
13Poliakov, V.P., de Siqueira, C.J. M., Veiga, W., Hummelgen, I.A., Lepienski, C.M., Kirpilenko, G.G.Dechandt, S.T.: Physical and tribological properties of hard amorphous DLC films deposited on difference substrates. Diamond Relat. Mater. 13, 1511 2004CrossRefGoogle Scholar
14Zhang, T.H.Huan, Y.: Nanoindentation and nanoscratch behaviors of DLC coatings on different steel substrates. Compos. Sci. Technol. 65, 1409 2005CrossRefGoogle Scholar
15Xu, Z.Rowcliffe, D.: Nanoindentation on diamond-like carbon and alumina coatings. Surf. Coat. Technol. 161, 44 2002CrossRefGoogle Scholar
16Michler, J.Blank, E.: Analysis of coating fracture and substrate plasticity induced by spherical indenters: Diamond and diamond-like carbon layers on steel substrates. Thin Solid Films 381, 119 2001CrossRefGoogle Scholar
17Singh, R.K., Tilbrook, M.T., Xie, Z.H., Bendavid, A., Martin, P., Munroe, P.R.Hoffman, M.: Contact damage evolution in diamondlike-carbon coatings on ductile substrates. J. Mater. Res. 23, 27 2008CrossRefGoogle Scholar
18Juliano, T., Domnich, V.Gogotsi, Y.: Examining pressure-induced phase transformations in silicon by spherical indentation and Raman spectroscopy. J. Mater. Res. 19, 3099 2004CrossRefGoogle Scholar
19Bradby, J.E., Williams, J.S., Wong-Leung, J., Swain, M.V.Munroe, P.: Transmission electron microscopy observation of deformation microstructure under spherical indentation in silicon. Appl. Phys. Lett. 77, 3749 2000CrossRefGoogle Scholar
20Bradby, J.E., Williams, J.S., Wong-Leung, J., Swain, M.V.Munroe, P.: Mechanical deformation in silicon by micro-indentation. J. Mater. Res. 16, 1500 2001CrossRefGoogle Scholar
21Zarudi, I.Zhang, L.C.: Structure changes in monocrystalline silicon subjected to indentation-experimental findings. Tribol. Int. 32, 701 1999CrossRefGoogle Scholar
22Zarudi, I., Zhang, L.C.Swain, M.V.: Microstructure evolution in monocrystalline silicon in cyclic microindentations. J. Mater. Res. 18, 758 2003CrossRefGoogle Scholar
23Domnich, V.Gogotsi, Y.: Phase transformations in silicon under contact loading. Rev. Adv. Mater. Sci. 3, 1 2002Google Scholar
24Cairney, J.M., Munroe, P.R.Hoffman, M.: The application of focused ion beam technology to the characterization of coatings. Surf. Coat. Technol. 198, 165 2005CrossRefGoogle Scholar
25Cairney, J.M., Smith, R.D.Munroe, P.R.: Transmission electron microscope specimen preparation of metal matrix composites using the focussed ion beam miller. Microsc. Microanal. 6, 452 2000CrossRefGoogle Scholar
26Haq, A.J., Munroe, P.R., Hoffman, M., Martin, P.J.Bendavid, A.: Nanoindentation-induced deformation behavior of diamond-like carbon coatings on silicon substrates. Thin Solid Films 515, 1000 2006CrossRefGoogle Scholar
27Ferrari, A.Robertson, J.: Interpretation of Raman spectra of disordered and amorphous carbon. J. Phys. Rev. B 61, 14095 2000CrossRefGoogle Scholar
28Casiraghi, C., Piazza, F., Ferrari, A.C., Grambole, D.Robertson, J.: Bonding in hydrogenated diamond-like carbon by Raman spectroscopy. Diamond Relat. Mater. 14, 1098 2005CrossRefGoogle Scholar
29Tamor, M.A.Vassell, W.C.: Raman “fingerprinting” of amorphous carbon films. J. Appl. Phys. 76, 3823 1994CrossRefGoogle Scholar
30Savvides, N.Bell, T.J.: Microhardness and Young’s modulus of diamond and diamondlike-carbon films. J. Appl. Phys. 72, 2791 1992CrossRefGoogle Scholar
31Stoneham, A.M., Godwin, P.D., Sutton, A.P.Bull, S.J.: Elastic and plastic deformation of diamondlike carbons. Bull. Appl. Phys. Lett. 72, 3142 1998CrossRefGoogle Scholar
32Peng, X.L.Clyne, T.W.: Mechanical stability of DLC films on metallic substrates: Part I-Film structure and residual stress levels. Thin Solid Films 312, 207 1998CrossRefGoogle Scholar
33Zarudi, I., Zhang, L.C., Cheong, W.C.D.Yu, T.X.: The difference of phase distributions in silicon after indentation with Berkovich and spherical indenters. Acta Mater. 53, 4795 2005CrossRefGoogle Scholar