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W–Ti–O layers for gas-sensing applications: Structure, morphology, and electrical properties

Published online by Cambridge University Press:  31 January 2011

L. Sangaletti
Affiliation:
Istituto Nazionale per la Fisica della Materia and Laboratorio di Strutturistica Chimica, Universit‘a di Brescia, Via Branze, 38–25123 Brescia, Italy
E. Bontempi
Affiliation:
Istituto Nazionale per la Fisica della Materia and Laboratorio di Strutturistica Chimica, Universit‘a di Brescia, Via Branze, 38–25123 Brescia, Italy
L. E. Depero
Affiliation:
Istituto Nazionale per la Fisica della Materia and Laboratorio di Strutturistica Chimica, Universit‘a di Brescia, Via Branze, 38–25123 Brescia, Italy
R. Salari
Affiliation:
Istituto Nazionale per la Fisica della Materia and Laboratorio di Strutturistica Chimica, Universit‘a di Brescia, Via Branze, 38–25123 Brescia, Italy
M. Zocchi
Affiliation:
Istituto Nazionale per la Fisica della Materia and Laboratorio di Strutturistica Chimica, Universit‘a di Brescia, Via Branze, 38–25123 Brescia, Italy
P. Nelli
Affiliation:
Istituto Nazionale per la Fisica della Materia and Dipartimento di Chimica e Fisica per l'Ingegneria e per i Materiali, Università di Brescia, Via Valotti, 9–25133 Brescia, Italy
G. Sberveglieri
Affiliation:
Istituto Nazionale per la Fisica della Materia and Dipartimento di Chimica e Fisica per l'Ingegneria e per i Materiali, Università di Brescia, Via Valotti, 9–25133 Brescia, Italy
P. Galinetto
Affiliation:
Istituto Nazionale per la Fisica della Materia and Dipartimento di Fisica A. Volta, Università di Pavia, Via A. Bassi, 6–27100 Pavia, Italy
M. Ferroni
Affiliation:
Istituto Nazionale per la Fisica della Materia and Dipartimento di Fisica, Università di Ferrara, Via Paradiso 12, Ferrara, Italy
V. Guidi
Affiliation:
Istituto Nazionale per la Fisica della Materia and Dipartimento di Fisica, Università di Ferrara, Via Paradiso 12, Ferrara, Italy
G. Martinelli
Affiliation:
Istituto Nazionale per la Fisica della Materia and Dipartimento di Fisica, Università di Ferrara, Via Paradiso 12, Ferrara, Italy
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Abstract

The kinetics of phase transitions and phase segregation induced by annealing temperature on the Ti–W–O gas-sensing layer was studied by x-ray diffraction, Raman spectroscopy, and scanning electron microscopy. The main goal was to identify, on the basis of kinetics studies, structurally stable Ti–WO3 thin film phases and compare their response to polluting gases in order to determine possible correlations between structural and electrical properties of the sensing layers.

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Copyright
Copyright © Materials Research Society 1998

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References

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