Skip to main content Accessibility help
×
Home
Hostname: page-component-55597f9d44-qcsxw Total loading time: 0.273 Render date: 2022-08-07T23:35:39.329Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "useRatesEcommerce": false, "useNewApi": true } hasContentIssue true

Oxygen Permeability of Ferroelectric Thin Film Top Electrodes and Its Effect on Detectable Fatigue Cycling-Induced Oxygen Isotope Motion

Published online by Cambridge University Press:  03 March 2011

Lawrence F. Schloss*
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
Hyoungsub Kim
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
Paul C. McIntyre
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
*
a)Address all correspondence to this author. e-mail: lschloss@stanford.edu
Get access

Abstract

We investigated the discrepancy between the significant 18O isotope motion observed after bipolar voltage cycling used to induce ferroelectric fatigue in unannealed Pt/Pb(Zr,Ti)O3/Ir (PZT) capacitors and the lack of any observable oxygen tracer motion in annealed capacitors. We found that while unannealed Pt electrodes are permeable to oxygen, annealed Pt electrodes are oxygen impermeable. Further, when the initial oxygen tracer profile does not vary strongly with depth, the ability to detect oxygen motion during fatigue voltage cycling depends critically on the oxygen permeability of the capacitor’s top electrode. Our results indicate that oxygen exchange between the PZT film and external oxygen sources and sinks during voltage cycling is not necessary for ferroelectric fatigue to be manifest. In addition, studies of the dependence of ferroelectric materials properties on ambient gases should be accompanied by analysis of the permeability of exposed surfaces to the gases of interest.

Type
Articles
Copyright
Copyright © Materials Research Society 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1Yoo, I.K. and Desu, S.B.: Phys. Status Solidi A. 133, 565 (1992).CrossRefGoogle Scholar
2Warren, W.L., Pike, G.E., Vanheusden, K., Dimos, D., Tuttle, B.A. and Robertson, J.: J. Appl. Phys. 79, 9250 (1996).CrossRefGoogle Scholar
3Park, C.H. and Chadi, D.J.: Phys. Rev. B. 57 R13961 (1998).Google Scholar
4Pöykkö, S. and Chadi, D.J.: Phys. Rev. Lett. 83, 1231 (1999).CrossRefGoogle Scholar
5Dawber, M. and Scott, J.F.: Appl. Phys. Lett. 76, 1060 (2000).CrossRefGoogle Scholar
6Dawber, M. and Scott, J.F.: Appl. Phys. Lett. 76, 3655 (2000).CrossRefGoogle Scholar
7Scott, J.F. and Dawber, M.: Appl. Phys. Lett. 76, 3801 (2000).CrossRefGoogle Scholar
8Lupascu, D.C. and Rabe, U.: Phys. Rev. Lett. 89, 187601 (2002).CrossRefGoogle Scholar
9Lo, V.C.: J. Appl. Phys. 92, 6778 (2002).CrossRefGoogle Scholar
10Scott, J.F., Araujo, C.A., Melnick, B.M., McMillan, L.D. and Zuleeg, R.: J. Appl. Phys. 70, 382 (1991).CrossRefGoogle Scholar
11Pan, M-J., Park, S-E., Park, C.W., Markowski, K.A., Yoshikawa, S. and Randall, C.A.: J. Am. Ceram. Soc. 79, 2971 (1996).CrossRefGoogle Scholar
12Nuffer, J., Lupascu, D.C., Rödel, J. and Schroeder, M.: Appl. Phys. Lett. 79, 3675 (2001).CrossRefGoogle Scholar
13Brazier, M., Mansour, S. and McElfresh, M.: Appl. Phys. Lett. 74, 4032 (1999).CrossRefGoogle Scholar
14McCormick, M.A., Slamovich, E.B., Metcalf, P. and McElfresh, M. in Ferroelectric Thin Films X edited by Gilbert, S.R., Trolier-McKinstry, S., Miyasaka, Y., Streiffer, S.K., and Wouters, D.J. (Mater. Res. Soc. Symp. Proc. 688, Warrendale, PA, 2002), p. 113Google Scholar
15Schloss, L.F., McIntyre, P.C., Hendrix, B.C., Bilodeau, S.M., Roeder, J.F. and Gilbert, S.R.: Appl. Phys. Lett. 81, 3218 (2002).CrossRefGoogle Scholar
16Roeder, J.F., Baum, T.H., Bilodeau, S.M., Stauf, G.T., Ragaglia, C., Russell, M.W. and VanBuskirk, P.C.: Adv. Mater. Opt. Electron. 10, 145 (2000).3.0.CO;2-2>CrossRefGoogle Scholar
17 SIMS measurements were performed at Charles Evans & Associates, 810 Kifer Road, Sunnyvale, CA 94086.Google Scholar
18Jung, D.J., Dawber, M., Ruediger, A., Scott, J.F., Kim, H.H. and Kim, K.: Appl. Phys. Lett. 81, 2436 (2002).CrossRefGoogle Scholar
19Schmiedl, R., Demuth, V., Lahnor, P., Godehardt, H., Bodschwinna, Y., Harder, C., Hammer, L., Strunk, H.P., Schulz, M. and Heinz, K.: Appl. Phys. A Mater. Sci. Proc. A62, 223 (1996).Google Scholar
20Maeder, T., Sagalowicz, L. and Muralt, P.: Jpn. J. Appl. Phys. 37, 2007 (1998).CrossRefGoogle Scholar
21Matsui, Y., Suga, M., Hiratani, M., Miki, H. and Fujisaki, Y.: Jpn. J. Appl. Phys. 36 L1239 (1997).CrossRefGoogle Scholar
22Stumpf, R., Liu, C-L. and Tracy, C.: Appl. Phys. Lett. 75, 1389 (1999).CrossRefGoogle Scholar
23Moulder, J.F., Stickle, W.F., Sobol, P.E. and Bomben, K.D.: Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer Corporation, Minnesota, 1992), pp. 188189Google Scholar
24Hosoda, H. and Wakashima, K.: Mater. Sci. Eng. A. A352, 16 (2003).CrossRefGoogle Scholar
25Waser, R.: J. Am. Ceram. Soc. 74, 1934 (1991).CrossRefGoogle Scholar

Save article to Kindle

To save this article to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Oxygen Permeability of Ferroelectric Thin Film Top Electrodes and Its Effect on Detectable Fatigue Cycling-Induced Oxygen Isotope Motion
Available formats
×

Save article to Dropbox

To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.

Oxygen Permeability of Ferroelectric Thin Film Top Electrodes and Its Effect on Detectable Fatigue Cycling-Induced Oxygen Isotope Motion
Available formats
×

Save article to Google Drive

To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.

Oxygen Permeability of Ferroelectric Thin Film Top Electrodes and Its Effect on Detectable Fatigue Cycling-Induced Oxygen Isotope Motion
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *