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Microstructural observation of a composite film of c-BN and h-BN phases

Published online by Cambridge University Press:  31 January 2011

Young-Joon Park*
Affiliation:
hin Film Technology Research Center, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul 130–650, Korea
Young-Joon Baik
Affiliation:
hin Film Technology Research Center, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul 130–650, Korea
Jae Hyoung Choi
Affiliation:
Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology, Daejon 305–701, Korea
Jeong Yong Lee
Affiliation:
Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology, Daejon 305–701, Korea
Jun-Hee Hahn
Affiliation:
Materials Evaluation Center, Korea Research Institute of Standards and Science (KRISS), P.O. Box 102, Yusong, Daejon 305–600, Korea
*
a)Address all correspondence to this author.
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Abstract

BN films consisting of c-BN and h-BN phases were synthesized using an ion-beam-assisted deposition process. In contrast to conventional observations, the c-BN and h-BN phases did not form separate layers, but were distributed in the form of nano-sized grains throughout the film thickness. No distinctly aligned h-BN layer was observed before the c-BN phase. Such a mixed character of the film was attributed to a localized ion bombardment effect instead of the macro-stress. Possibly because of the presence of scattered h-BN phases, the thin film described here possessed a low hardness of about 20 GPa and a low stress of about 5 GPa, compared with other reported c-BN-containing films.

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Articles
Copyright
Copyright © Materials Research Society 2000

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