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Measurement of Young’s modulus of anisotropic materials using microcompression testing

Published online by Cambridge University Press:  21 February 2012

In-suk Choi*
Affiliation:
Karlsruhe Institute of Technology, Institute for Applied Materials, 76131 Karlsruhe, Germany; and High Temperature Energy Materials Center, Korea Institute of Science and Technology, Seongbuk-gu, Seoul 136-791, Republic of Korea
Yixiang Gan
Affiliation:
Karlsruhe Institute of Technology, Institute for Applied Materials, 76131 Karlsruhe, Germany; and School of Civil Engineering, The University of Sydney, Sydney, NSW 2006, Australia
Daniel Kaufmann
Affiliation:
Karlsruhe Institute of Technology, Institute for Applied Materials, 76131 Karlsruhe, Germany
Oliver Kraft
Affiliation:
Karlsruhe Institute of Technology, Institute for Applied Materials, 76131 Karlsruhe, Germany
Ruth Schwaiger
Affiliation:
Karlsruhe Institute of Technology, Institute for Applied Materials, 76131 Karlsruhe, Germany
*
a)Address all correspondence to this author. e-mail: insukchoi@kist.kr
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Abstract

Microcompression test was applied to determine the Young’s modulus for elastically anisotropic materials for two different orientations of single crystalline Si. Although there is a clear difference in the apparent Young’s moduli for the different orientations, a significant underestimation of Young’s modulus was observed resulting from the substrate deformation as observed in both finite element simulation and experiment. This effect decreases with increasing aspect ratio. To correct the deviation of the apparent Young’s modulus from the theoretical values, a systematic framework of microcompression test is suggested. The modified Sneddon correction using the indentation modulus instead of Young’s modulus successfully yields Young’s moduli of single crystalline silicon in the [100] and [111] directions to within 5.3% and 2.0% deviation, respectively.

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Copyright
Copyright © Materials Research Society 2012

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