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Test of precision weak-link stage systems with large travel range and subnanometre-scale resolution

Published online by Cambridge University Press:  15 December 2010

D. Shu  and
J. Maser
D. Shu*
Affiliation:
Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, USA
J. Maser
Affiliation:
Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, USA Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439, USA
*
†Email address for correspondence: shu@aps.anl.gov
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Abstract

The precision ball-bearing- or roller-bearing-based stage systems provide large travel range. However, they have difficulties in meeting subnanometre resolution, high tilting stiffness and high straightness of trajectory with a single guiding system. It is always a dream to have a compact single flexure stage to cover a large travel range with very high positioning resolution. Based on an advanced structure design with the laminar overconstrained weak-link technique, we have designed and constructed a two-dimensional linear precision weak-link stage system for nanopositioning of a specimen holder for the linear multilayer Laue lenses test setup at the Advanced Photon Source Sector 26. This system provides subnanometre resolution, coupled with subnanometre metrology at a travel range of several millimetres. The two-dimensional weak-link stage system is designed with high structure stiffness using laminar overconstrained weak-link mechanisms. In this paper we present the preliminary test results of a linear precision weak-link stage system with subcentimetre travel range and subnanometre positioning resolution.

Type
Contributed paper
Information
Diamond Light Source Proceedings , Volume 1 , Issue MEDSI-6 , October 2010 , e41
Copyright
Copyright © Diamond Light Source Ltd 2010

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References

REFERENCES

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