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Quantitative Microprose Analysis with Energy Dispersive Detectors - A Status Report

Published online by Cambridge University Press:  06 March 2019

E. Lifshin
E. Lifshin*
Affiliation:
General Electric Corporate Research and Development Schenectady, New York 12301
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Abstract

Methods for quantitative microprobe analysis of flat samples with energy dispersive spectrometers are reviewed for the case when the electron beam is well contained in the analyzed region. Particular attention is paid to models for background subtraction and peak overlap necessitated by limited energy resolution. Present indications are that careful data collection procedures can often lead to accuracy comparable to crystal diffraction spectrometers.

Type
Mathematical Correction Procedures for X-Ray Spectrochemical Analysis
Information
Advances in X-Ray Analysis , Volume 19: Twenty-Fourth Annual Conference on Applications of X-ray Analysis, August 6-8, 1975 , 1975 , pp. 113 - 152
Copyright
Copyright © International Centre for Diffraction Data 1975

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