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An X-Ray Study of Ion-Implanted Liquid Phase Epitaxial Garnet Films with a Single Crystal Dirfractometer

Published online by Cambridge University Press:  06 March 2019

Po-wen Wang ,
Kochan Ju  and
T. C. Huang
Po-wen Wang
Affiliation:
IBM Research Laboratory, 5600 Cottle Road, San Jose, California 95193
Kochan Ju
Affiliation:
IBM Research Laboratory, 5600 Cottle Road, San Jose, California 95193
T. C. Huang
Affiliation:
IBM Research Laboratory, 5600 Cottle Road, San Jose, California 95193
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Abstract

A vertical scanning single crystal diffractometer with graphite monochromator and narrow divergent beam controlled by an IBM Series/1 computer was used to study crystal damage in the ion-implanted garnet films including strain effects induced by multi-implantation processes as a function of the types of ions, their energies and doses, growth and annealing temperatures.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 24: Twenty-Ninth Annual Conference on Applications of X-ray Analysis, August 4-8, 1980 , 1980 , pp. 209 - 213
Copyright
Copyright © International Centre for Diffraction Data 1980

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References

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