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Analysis of Specific Interfaces in Thin Films by X-Ray Fluorescence Using Interference Effect in Total Reflection

Published online by Cambridge University Press:  06 March 2019

Kenji Sakurai
Affiliation:
National Research Institute for Metals: 1-2-1 Sengen, Tsukuba, Ibaraki 305, Japan
Atsuo Iida
Affiliation:
National Research Institute for Metals: 1-2-1 Sengen, Tsukuba, Ibaraki 305, Japan
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Abstract

It has been proposed that the interference effect in grazing incidence/exit X-ray fluorescence can be used as an analytical tool. Though these total reflection related measurements have been widely used because of their inherent high sensitivity to the surface of materials, the interference in case of thin films is most likely to be considered difficult to analyze. The present paper describes the use of the interference effect to provide additional capability to enhance information on a specific interface of a thin film. Detailed interpretation of the angular resolved fluorescence tells us at which interface an element of interest is localized. It can be applied to the thin film of only a few layers or non-periodic multilayers where a regular standing wave is not generated.

Type
Research Article
Copyright
Copyright © International Centre for Diffraction Data 1995

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