Book contents
- Frontmatter
- Contents
- Preface
- 1 Fundamentals of laser energy absorption
- 2 Lasers and optics
- 3 Thermal processes in laser–materials interactions
- 4 Desorption at low laser energy densities
- 5 Dynamics of laser ablation
- 6 Ultrafast-laser interactions with materials
- 7 Laser processing of thin semiconductor films
- 8 Laser-induced surface modification
- 9 Laser processing of organic materials
- 10 Pulsed-laser interaction with liquids
- 11 Laser cleaning of particulate contaminants
- 12 Laser interactions with nanoparticles
- 13 Laser-assisted microprocessing
- 14 Nano-structuring using pulsed laser radiation
- Index
- References
3 - Thermal processes in laser–materials interactions
Published online by Cambridge University Press: 04 December 2009
Book contents
- Frontmatter
- Contents
- Preface
- 1 Fundamentals of laser energy absorption
- 2 Lasers and optics
- 3 Thermal processes in laser–materials interactions
- 4 Desorption at low laser energy densities
- 5 Dynamics of laser ablation
- 6 Ultrafast-laser interactions with materials
- 7 Laser processing of thin semiconductor films
- 8 Laser-induced surface modification
- 9 Laser processing of organic materials
- 10 Pulsed-laser interaction with liquids
- 11 Laser cleaning of particulate contaminants
- 12 Laser interactions with nanoparticles
- 13 Laser-assisted microprocessing
- 14 Nano-structuring using pulsed laser radiation
- Index
- References
Summary
A summary is not available for this content so a preview has been provided. Please use the Get access link above for information on how to access this content.
- Type
- Chapter
- Information
- Transport in Laser MicrofabricationFundamentals and Applications, pp. 60 - 86Publisher: Cambridge University PressPrint publication year: 2009
References
, 1968, “Vaporization of Metal Absorbing Laser Radation,” Sov. Phys. JETP, 27, 182–183.Google Scholar
, , and , 1995, “Near-Threshold Laser Sputtering of Gold,” J. Appl. Phys., 77, 849–864.CrossRefGoogle Scholar
, 1991, “Cu0, Cu+, and Cu2 from Excimer-Ablated Copper,” J. Appl. Phys., 69, 1721–1729.CrossRefGoogle Scholar
, and , 1980, “Improved Experimental Determination of Critical-Point Data for Tungsten,” High Temp. – High Pressures, 12, 419–432.Google Scholar
, , , , and , 1993a, “Localized Transient Surface Reflectivity Measurements and Comparison to Heat Transfer Modeling in Thin Film Laser Annealing,” Int. J. Heat Mass Transfer, 36, 1219–1229.CrossRefGoogle Scholar
, , and , 1995, “Computational Model for the Heat Transfer and Gas Dynamics in the Pulsed Laser Evaporation of Metals,” J. Appl. Phys., 78, 4696–4709.CrossRefGoogle Scholar
, 1975, “Theory of Melt Growth,” in Crystal Growth and Characterization, edited by and , Amsterdam, North-Holland.Google Scholar
, 1990, “On the Dual Role of the Knudsen Layer and Unsteady, Adiabatic Expansion in Pulse Sputtering Phenomena,” J. Chem. Phys., 92, 5047–5056.CrossRefGoogle Scholar
, and , 1996, “Comments on Explosive Mechanisms of Laser Sputtering,” Appl. Surf. Sci., 96–98, 205–215.Google Scholar
, and , 1985, “Laser Sputtering: Part III. The Mechanism of the Sputtering of Metals at Low Energy Densities,” Nucl. Instrum. Meth. Phys. Res., B7/8, 755–763.CrossRefGoogle Scholar
, 1976, “Evaporation from a Cylindrical Surface into Vacuum,” J. Fluid Mech., 75, 469–486.CrossRefGoogle Scholar
, 1979, “Theoretical Modeling of Rapid Surface Vaporization with Back Pressure,” AIAA J., 17, 519–523.CrossRefGoogle Scholar
, , and , 1986, “Nanosecond Resolution Time-Resolved X-Ray Study of Silicon during Pulsed-Laser Irradiation,” J. Mater. Res., 1, 144–154.CrossRefGoogle Scholar
, , , and , 1982, “Synchrotron X-Ray Diffraction Study of Silicon during Pulsed Laser-Annealing,” Phys. Rev. Lett., 48, 337–340.CrossRefGoogle Scholar
, , , and , 2002, “Delayed Phase Explosion during High-Power Nanosecond Laser Ablation of Silicon,” Appl. Phys. Lett., 80, 3072–3074.CrossRefGoogle Scholar
, 1974, “Vaporization and Boiling of Liquid Metal in an Exploding Wire,” Sov. Phys. Techn. Phys., 19, 793–797.Google Scholar
, 1976, “Mechanism for Metal Damage by Intense Electromagnetic Radiation,” Sov. Phys. Techn. Phys., 21, 430–433.Google Scholar
, 1969, “Optical Properties of Liquid Metals at High Temperatures” Phil. Mag., 20, 1115–1132.CrossRefGoogle Scholar
, and , 1995, “Critical Assessment of Thermal Models for Laser Sputtering at High Fluences,” Appl. Phys. Lett., 67, 3535–3537.CrossRefGoogle Scholar
, and , 1982, “Temperature Profile Induced by a Scanning CW Laser Beam,” J. Appl. Phys., 53, 4364–4371.CrossRefGoogle Scholar
, , , and , 1996, “Optical Probing of the Temperature Transients during Pulsed-Laser Induced Vaporization of Liquids,” Appl. Phys. Lett., 68, 596–598.CrossRefGoogle Scholar
, , and , 1987, “Dynamics of Rapid Solidification in Silicon,” Proc. Mater. Res. Soc., 5, 15–30.Google Scholar
, , , and , 1988, Laser and Electron Beam Materials Processing Handbook, Moscow, Mir Publishers, pp. 194–232.Google Scholar
, 1994, “Critical Phenomenon Analysis of Surface-Tension of Liquid-Metals,” J. Jap. Inst. Metals, 58, 1161–1168.CrossRefGoogle Scholar
, , , and , 1997, “Excimer Laser Ablation of Thin Gold Films on a Quartz Crystal Microbalance at Various Argon Background Pressures,” Appl. Phys. A, 64, 545–552.CrossRefGoogle Scholar