2 results
Atom Probe Tomography Characterization of Dopant Distributions in Si FinFET: Challenges and Solutions
-
- Journal:
- Microscopy and Microanalysis / Volume 26 / Issue 1 / February 2020
- Published online by Cambridge University Press:
- 22 November 2019, pp. 36-45
- Print publication:
- February 2020
-
- Article
- Export citation
Three-Dimensional Nanoscale Mapping of State-of-the-Art Field-Effect Transistors (FinFETs)
-
- Journal:
- Microscopy and Microanalysis / Volume 23 / Issue 5 / October 2017
- Published online by Cambridge University Press:
- 31 August 2017, pp. 916-925
- Print publication:
- October 2017
-
- Article
- Export citation