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Organic Contamination of Silicon Wafer in Clean Room Air and its Impact to Gate Oxide Integrity
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 477 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 101
- Print publication:
- 1997
-
- Article
- Export citation
Organic Contamination of Silicon Wafer in Clean Room Air and Its Impact to Gate Oxide Integrity
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 473 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 161
- Print publication:
- 1997
-
- Article
- Export citation