1 results
Bisethylacetoacetato Cu(II) as a novel metal-organic precursor for Cu film production by plasma-enhanced chemical vapor deposition toward ultra-large-scale integration metallization
-
- Journal:
- Journal of Materials Research / Volume 11 / Issue 5 / May 1996
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1051-1060
- Print publication:
- May 1996
-
- Article
- Export citation