Crossref Citations
This article has been cited by the following publications. This list is generated based on data provided by
Crossref.
Lakshmanan, Satish K.
and
Gill, William N.
1998.
Experiments on the plasma assisted chemical vapor deposition of copper.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films,
Vol. 16,
Issue. 4,
p.
2187.
Koh, S.K.
Choi, S.C.
Kim, K.H.
Jung, H.-J.
Choi, G.J.
Yang, H.S.
and
Cho, Y.S.
1999.
Effects of Cu seeding layer on Si grown by partially ionized beam in plasma enhanced chemical vapor deposition.
Thin Solid Films,
Vol. 347,
Issue. 1-2,
p.
121.
LAKSHMANAN, SATISH K.
and
GILL, WILLIAM N.
2000.
A NEW FEATURE SCALE MODEL AND EXPERIMENTS OF THE HYDROGEN PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION OF COPPER.
Chemical Engineering Communications,
Vol. 182,
Issue. 1,
p.
99.
Vertoprakhov, Vladimir N
and
Krupoder, Sergey A
2000.
Preparation of thin copper films from the vapour phase of volatile copper(I) and copper(II) derivatives by the CVD method.
Russian Chemical Reviews,
Vol. 69,
Issue. 12,
p.
1057.
Rickerby, J.
and
Steinke, J. H. G.
2002.
Current Trends in Patterning with Copper.
Chemical Reviews,
Vol. 102,
Issue. 5,
p.
1525.
Lay, Eddy
Song, Yi-Hwa
Chiu, Yuan-Chieh
Lin, Yang-Miin
Chi, Yun
Carty, Arthur J.
Peng, Shie-Ming
and
Lee, Gene-Hsiang
2005.
New CVD Precursors Capable of Depositing Copper Metal under Mixed O2/Ar Atmosphere.
Inorganic Chemistry,
Vol. 44,
Issue. 20,
p.
7226.
Skaf, Dorothy W.
Kandula, Sunita
Harmonay, Lauren
Shodder, Philip
Bessel, Carol A.
and
Weinstein, Randy D.
2006.
Kinetics of the Reactions of Cu(0) and Cu2O in Hexanes or Condensed Carbon Dioxide by tert-Butyl Peracetate and 1,1,1-Trifluoro-2,4-pentanedione.
Industrial & Engineering Chemistry Research,
Vol. 45,
Issue. 26,
p.
8874.
Lam, Frank
Zhang, Ying
Hu, Xijun
Sheng, Ping
and
Yan, Zifeng
2006.
Fabrication of Copper Nanowire Encapsulated in SBA-15 Nanocomposite by Metal Organic Chemical Vapor Deposition.
Zhang, Ying
Lam, Frank Leung-Yuk
Hu, Xijun
and
Yan, Zifeng
2006.
Fabrication of copper nanorods by low-temperature metal organic chemical vapor deposition.
Chinese Science Bulletin,
Vol. 51,
Issue. 21,
p.
2662.
Zhang, Ying
Lam, Frank Leung-Yuk
Hu, Xijun
Yan, Zifeng
and
Sheng, Ping
2007.
Fabrication of Copper Nanowire Encapsulated in the Pore Channels of SBA-15 by Metal Organic Chemical Vapor Deposition.
The Journal of Physical Chemistry C,
Vol. 111,
Issue. 34,
p.
12536.