The adhesion of crosslinked PDMS surfaces to self-assembled monolayers with different chemical functionality was investigated using the JKR method, the contact mechanics of solids spreading their interfacial area under load. Interfacial H-bonding was shown to be an important chemical interaction causing significant adhesion hysteresis. The number of H-bonds between PDMS and silanol groups on SiO2/Si surfaces increased with time of the contact under a constant load, indicating pressure-induced reorganization of the PDMS network near the interface. The interaction between PDMS and carboxylic acid groups showed somewhat smaller hysteresis which suggests weaker H-bonding strength. The interaction between PDMS and functionalized biphenyl groups exhibited small hysteresis which is believed to be caused by dipolar interaction. whereas that between PDMS and nonpolar perfluorocarbon groups showed negligible hysteresis. The distinction in the behavior of the unloading data between H-bonding related interaction and dipolar interaction seems to indicate the difference in the nature between non-specific (van der Waals, dipolar) and specific (donor-acceptor, H-bond, acid-base) interactions.