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Micromachining of mesoporous oxide films for microelectromechanical system structures
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- Journal:
- Journal of Materials Research / Volume 17 / Issue 8 / August 2002
- Published online by Cambridge University Press:
- 31 January 2011, pp. 2121-2129
- Print publication:
- August 2002
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Preparation of Mesoporous Oxides for Mems Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 657 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, EE7.3
- Print publication:
- 2000
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- Article
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