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Pentagate Approach to Reduce the Line Edge Roughness Effects in Bulk Si Tri-gate Transistors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1510 / 2013
- Published online by Cambridge University Press:
- 11 April 2013, mrsf12-1510-dd05-20
- Print publication:
- 2013
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- Article
- Export citation