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Single crystalline AlN epitaxial layers have been grown on and (0001) sapphire and 6H-SiC substrates by MOVPE technique at high temperatures in the range of 1340-1500°C. The structural qualities of the high temperature grown AlN layers were found to be good as evidenced by X-ray diffraction analyses results. By transmission electron microscopic analysis, dislocation densities of the layers were found to be 6.2 × 107 cm−2 or lower and the formation of dislocation loops was confirmed. High temperature bridge layers of AlN and AlxGa1−xN layers were grown on linear-groove patterned sapphire based AlN templates and 6H-SiC substrates. AlxGa1−xN bridge layers exhibited different growth behaviours depending on the direction of groove patterns on the sub-strates.
Single crystals of AlN have been grown by seeded (on SiC substrates) and unseeded (spontaneous nucleation) sublimation techniques. Tantalum carbide coated graphite crucibles were used. Temperature gradient and source-substrate distance have been found to be the most influencing parameters of crystal growth. AlN crystals of maximum dimension 12 mm (length) × 10 mm (width) × 300 μm (thickness) were grown on 6H-SiC substrates and the best (0002) oriented crystal showed an XRD omega rocking curve FWHM of 4.81 arcmin. AlN nucleated as independent hexagonal islands and coalesced as growth progressed on. Growth rate of AlN grown on C-face SiC has been found to be higher than that on Si-face SiC. Tantalum carbide coated crucibles have been found to be better suited for AlN growth as the impurity incorporation in to the crystals due to crucible was very less. Spontaneously nucleated crystals exhibited an incompleted pyramid-like structure with (1010) and (1100) as their prominent faces.
The heteroepitaxial growth of a GaN single crystal by metal-organic vapor phase epitaxy on a 4H-SiC (3038) substrate was demonstrated. The crystallographic orientation of GaN was found to be dependent on growth pressure. When the growth pressure was 1000 hPa, the orientation of the GaN single crystal was consistent with that of the SiC substrate, where the c-plane of the GaN was single crystal tilted 54.7° from the surface plane. Then, we fabricated a violet-light-emitting diode (LED) with a GaInN multiple-quantum-well (QW) active layer grown on the GaN layer, which coherently grew on the 4H-SiC (3038 ) substrate. The blue shift of the peak wavelength with increasing injection current of up to 100 mA was confirmed to be two times smaller than that of a conventional LED on a c-plane sapphire substrate due to a low internal polarization.
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