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Plasma Enhanced Chemical Vapor Deposition of Zirconium Nitride Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 410 / 1995
- Published online by Cambridge University Press:
- 10 February 2011, 289
- Print publication:
- 1995
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- Article
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Low Temperature Atmospheric Pressure Chemical Vapor Deposition of Group 14 Oxide Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 343 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 523
- Print publication:
- 1994
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- Article
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