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Comparison Study for TiN Films Deposited from Different Method: Chemical Vapor Deposition and Atomic Layer Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 672 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, O7.8
- Print publication:
- 2001
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- Article
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Preparation and characterization of (Ba,Sr)TiO3 thin films by liquid source chemical vapor deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 672 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, O9.2
- Print publication:
- 2001
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- Article
- Export citation