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3 results

  • Fast Grain Mapping with Sub-Nanometer Resolution Using 4D-STEM with Grain Classification by Principal Component Analysis and Non-Negative Matrix Factorization
  • Frances I. Allen, Thomas C. Pekin, Arun Persaud, Steven J. Rozeveld, Gregory F. Meyers, Jim Ciston, Colin Ophus, Andrew M. Minor
  • Journal: Microscopy and Microanalysis / Volume 27 / Issue 4 / August 2021
  • Published online by Cambridge University Press: 25 June 2021, pp. 794-803
  • Print publication: August 2021
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    High-throughput grain mapping with sub-nanometer spatial resolution is demonstrated using scanning nanobeam electron diffraction (also known as 4D scanning transmission electron microscopy, or 4D-STEM) combined with high-speed direct-electron detection. An electron probe size down to 0.5 nm in diameter is used and the sample investigated is a gold–palladium nanoparticle catalyst. Computational analysis of the 4D-STEM data sets is performed using a disk registration algorithm to identify the diffraction peaks followed by feature learning to map the individual grains. Two unsupervised feature learning techniques are compared: principal component analysis (PCA) and non-negative matrix factorization (NNMF). The characteristics of the PCA versus NNMF output are compared and the potential of the 4D-STEM approach for statistical analysis of grain orientations at high spatial resolution is discussed.