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Characterization of Chemical-Mechanical Polishing Dielectrics for Multilevel Metallization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 139
- Print publication:
- 1994
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- Article
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Rapid Thermal Oxidation of Lightly Doped Silicon in N2O
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- Journal:
- MRS Online Proceedings Library Archive / Volume 342 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 181
- Print publication:
- 1994
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- Article
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