10 results
Atomic Layer Deposited Hybrid Organic-Inorganic Aluminates as Potential Low-k Dielectric Materials
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1791 / 2015
- Published online by Cambridge University Press:
- 25 May 2015, pp. 15-20
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- 2015
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The Role of Pore Characterization in the Challenge to Integrate Porous low-k Dielectrics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B02-06
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- 2007
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Depth-profiling Pore Morphology in Nanoporous Thin Films Using Positronium Lifetime Annihilation Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 863 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, B1.6
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- 2005
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Determining Pore Structure and Growth Mechanisms in Templated Nanoporous Low-k Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 863 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, B3.4
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- 2005
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Structure and Properties of Polysilsesquioxanes and Copolymers for Ultra-Low Dielectric Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 766 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E6.5
- Print publication:
- 2003
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A Study of Atomic Layer Deposition and Reactive Plasma Compatibilitywith Mesoporous Organosilicate Glass Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 766 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E10.8
- Print publication:
- 2003
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Effect of material properties on integration damage in organosilicate glass films
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- Journal:
- Journal of Materials Research / Volume 16 / Issue 12 / December 2001
- Published online by Cambridge University Press:
- 31 January 2011, pp. 3335-3338
- Print publication:
- December 2001
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Positron Annihilation Lifetime Spectroscopy (Pals) Application in Metal Barrier Layer Integrity for Porous Low-K Materials
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- Journal:
- MRS Online Proceedings Library Archive / Volume 686 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, A9.7
- Print publication:
- 2001
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A Broad Perspective on the Dynamics of Highly Confined Polymer Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 710 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, DD3.7.1
- Print publication:
- 2001
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Structural Changes in Glassy Polycarbonate Due to Cyclic Loading
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- Journal:
- MRS Online Proceedings Library Archive / Volume 215 / 1990
- Published online by Cambridge University Press:
- 16 February 2011, 61
- Print publication:
- 1990
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