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1 results

  • Mechanism-based design of precursors for focused electron beam-induced deposition

  • Will G. Carden, Hang Lu, Julie A. Spencer, D. Howard Fairbrother, Lisa McElwee-White
  • Journal:
    MRS Communications / Volume 8 / Issue 2 / June 2018
    Published online by Cambridge University Press:
    26 April 2018, pp. 343-357
    Print publication:
    June 2018

  • Focused electron beam-induced deposition (FEBID) is capable of producing metal-containing nanostructures with lateral resolution on the sub-nanometer scale. Practical application of this nanofabrication technique has been hindered by ligand-derived contamination from precursors developed for thermal deposition methods. Mechanistic insight into FEBID through surface science studies and gas-phase electron–molecule interactions has begun to enable the design of custom FEBID precursors. These studies have shown that precursors designed to decompose under electron irradiation can produce high-purity FEBID deposits. Herein, we highlight the progress in FEBID precursor development with several examples that incorporate this mechanism-based design approach.