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Three-Dimensional Nanoscale Mapping of State-of-the-Art Field-Effect Transistors (FinFETs)
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- Journal:
- Microscopy and Microanalysis / Volume 23 / Issue 5 / October 2017
- Published online by Cambridge University Press:
- 31 August 2017, pp. 916-925
- Print publication:
- October 2017
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- Article
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