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Evaluation of Polishing-Induced Subsurface Damage of 4H-SiC (0001) by Cross-Sectional Electron Backscattered Diffraction and Synchrotron X-Ray Micro-Diffraction
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- Journal:
- MRS Advances / Volume 1 / Issue 55 / 2016
- Published online by Cambridge University Press:
- 09 June 2016, pp. 3697-3702
- Print publication:
- 2016
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- Article
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