1 results
Investigation of minute strain in silicon on insulator and strained-silicon/silicon–germanium/silicon-substrate semiconductor materials using a synchrotron radiation X-ray microbeam
-
- Journal:
- Diamond Light Source Proceedings / Volume 1 / Issue SRMS-7 / October 2010
- Published online by Cambridge University Press:
- 14 January 2011, e122
- Print publication:
- October 2010
-
- Article
- Export citation