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Accurate Sheet Resistance Measurement on Ultra-Shallow Profiles
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- Journal:
- MRS Online Proceedings Library Archive / Volume 912 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0912-C05-07
- Print publication:
- 2006
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- Article
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Non-contact Electrical Measurements of Sheet Resistance and Leakage Current Density for Ultra-shallow (and other) Junctions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C11.9
- Print publication:
- 2004
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- Article
- Export citation